This project aims to revolutionize the inspection of flat optical components by developing a non-destructive system using an imaging ellipsometer. The system will collect both reflected and diffracted light from components such as 1D gratings, 2D gratings, metagratings, and metalens. The critical dimensions of these components will be reconstructed using the Rigorous Coupled-Wave Analysis (RCWA) method for nano-optical response simulation and the Genetic Algorithm (GA) method. The project will span 12 months, divided into design, construction, testing, and optimization phases. The design phase will involve rigorous theoretical calculations and simulations. The construction phase will involve procuring necessary materials and components, assembling the device, and calibrating it for accurate measurements. The testing phase will involve collecting and analyzing optical response data from a variety of components. The optimization phase will involve refining the reconstruction methods based on test results. The benefits of this project are significant. It will provide a non-destructive inspection method, improve accuracy, streamline the inspection process, and contribute to the advancement of optical technology.
