SemiconDoctor: Coaxial Line-Scan Confocal 3D Sensing System
Technology Transfer & Commercialisation

SemiconDoctor: Coaxial Line-Scan Confocal 3D Sensing System

Silver Medal

SemiconDoctor: Coaxial Line-Scan Confocal 3D Sensing System

The invention relates to a line scanning 3D imaging technology. Which adopts the most state of art designed confocal spectral dispersive telecentric optical lens, to disperse the visible white light spectrum along the axis direction and forms a wavelength gradually distributed rainbow light sheet on the measured surface.

The spectrum of different heights is reflected back to the optical path. After the beam splitter, collimating lens, diffraction grating, and condenser lens, the spectrum is separated and magnified, forms a profile image of the measured surface with the height information.