On-chip semiconductor sensor design & optimisation

On-chip semiconductor sensor design & optimisation

  • Hall sensors have been simulated in virtual fab platform. Several design parameters such as dimension, doping concentration, contact size have been simulated and optimised using TCAD. Hall voltage and sensitivity curve have been obtained to predict the performance of the sensor. Other process options such as p+ implant on top, replacing n-well with p-sub have also been simulated to compare the performance.