Design and Fabrication Methodology of Production-Ready MEMS Devices: (1) A “Fabrication-able” MEMS Scanning Mirror Device

Design and Fabrication Methodology of Production-Ready MEMS Devices: (1) A “Fabrication-able” MEMS Scanning Mirror Device

  • Design and Fabrication Methodology of Production-Ready MEMS Devices: (1) A “Fabrication-able” MEMS Scanning Mirror Device
    ART/071CP
    20090916 - 20110315
    7170

    Dr Francis Chee-Shuen Lee