Design and Fabrication Methodology of Production-Ready MEMS Devices: (1) A “Fabrication-able” MEMS Scanning Mirror Device
ART/071CP
20090916 - 20110315
7170
Dr Francis Chee-Shuen Lee
1.“Fabrication-able” electrostatic scanning mirror design rules and process control methods
2. A functional bi-axial Lissajous MEMS scanning mirror prototype
Applicable to image projection with a WVGA (800*480) resolution
Beijing Jinshi Co. Ltd. [Sponsor]
COVENTOR Inc [Sponsor]
Foryou Multimedia Electronics Co. Ltd.
Minami Electronics Ltd.
The 24th Research Institute of China Electronics Technology Group Corporation [Sponsor]
This R&D project aims for the development of a fabrication-compatible design methodology for MEMS using a MEMS scanning mirror device as the first subject to be evolved into stable manufacturability. This bi-axial MEMS scanning mirror prototype will be our attempt to demonstrate the effectiveness of the design rules derived in this effort as well as the key process controlling methods which may include simulation, test structures/sites and process/materials integration considerations. In future applications, the MEMS scanning mirror will be applied as a key optical component in scan-image detection and scan-projection applications which will require a moderate to high image quality standard. Applications of the MEMS scanning mirrors in vision systems such as the automotive head up display (HUD), mobile pico projector, head-mount display (HMD) and virtual reality display (VRD) are projected to become common and popular in our future daily-life. To develop the “fabrication-able” MEMS prototype, a stable and established fabrication vendor/foundry will first be identified up-front and their fabrication processes, capability and design constraints will have to be tabulated. Working closely with the foundry, control methods for process-dependent dimensional controls, mechanical properties controls, dynamic controls, as well as electro-mechanical behavior controls will be established. The resulting MEMS scanning mirror device should demonstrate the functional objectives specified in the design goals. We also intend to work closely with academic and industrial partners to explore higher integration viability of more complex MEMS actuators such as electromagnetic motors. During the course of this project, ASTRI will seek quick technology transfer paths to the industry and further advancements of MEMS by tightly collaborating among various industrial applicators and academia in Greater China.